Development of a vertical optical coupler using a slanted etching of InP/InGaAsP waveguide-Reference-Cited by-同舟云学术

Development of a vertical optical coupler using a slanted etching of InP/InGaAsP waveguide

Published:2013 Issue:6 Volume:10 Page:20130116-20130116
ISSN:1349-2543
Container-title:IEICE Electronics Express
language:en
Short-container-title:IEICE Electron. Express

Author:

Choi Sunghan¹,Higo Akio¹,Zaitsu Masaru¹,Kwack Myung-Joon¹,Sugiyama Masakazu²,Toshiyoshi Hiroshi¹,Nakano Yoshiaki¹

Affiliation:

1. Research Center for Advanced Science and Technology (RCAST), The University of Tokyo

2. Department of Electrical Engineering and Information Systems, The University of Tokyo

Publisher

Institute of Electronics, Information and Communications Engineers (IEICE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://www.jstage.jst.go.jp/article/elex/10/6/10_10.20130116/_pdf

Reference7 articles.

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2. [2] D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett., vol. 29, no. 23, pp. 2749-2751, 2004.

3. [3] L. Chen, L. Zhang, C. R. Doerr, N. Dupuis, N. G. Weimann, and R. F. Kopf, “Efficient Membrane Grating Couplers on InP,” IEEE Photon. Technol. Lett., vol. 22, no. 12, pp. 890-892, 2010.

4. [4] F. V. Laere, M. V. Kotlyar, D. Taillaert, D. V. Thourhout, T. F. Krauss, and R. Baets, “Compact Slanted Grating Couplers Between Optical Fiber and InP-InGaAsP Waveguides,” IEEE Photon. Technol. Lett., vol. 19, no. 6, pp. 396-398, 2007.

5. [5] M. Nakada, K. Takahashi, T. Takahashi, A. Higo, H. Fujita, and H. Toshiyoshi, “Development of Skewed DRIE Process and its Application to Electrostatic Tilt Mirror,” Proc. 22nd IEEE Int. Conf. Micro Electro Mechanical Systems, Sorrento, Italy, pp. 1087-1090, 2009.

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