Extremely-high-sensitivity low-power MEMS accelerometer and its applications
Author:
Affiliation:
1. Hitachi, Ltd.
Publisher
Institute of Electronics, Information and Communications Engineers (IEICE)
Subject
General Earth and Planetary Sciences,General Environmental Science
Link
https://www.jstage.jst.go.jp/article/essfr/17/1/17_44/_pdf
Reference14 articles.
1. 1) 相澤隆生，国見敬，伊東俊一郎，他，“地震探査用MEMS受振器の開発，”応用地質，vol. 59, no. 2, pp. 84-93, 2018．
2. 2) M. Pastre, M. Kayal, H. Schmid, et al., “A 300 Hz 19b DR capacitive accelerometer based on a versatile front end in a 5th-order ΔΣ loop,” 2009 Proceedings of ESSCIRC, pp. 288-291, Athens, Greece, 2009, doi:10.1109/ESSCIRC.2009.5326033.
3. 3) X. Wang, J. Zhao, Y. Zhao, et al., “27.2 A1.2 μg/√Hz-resolution 0.4 μg-bias-instability MEMS silicon oscillating accelerometer with CMOS readout circuit,” 2015 IEEE ISSCC Dig. Tech. Papers, pp. 476-477, San Francisco, CA, USA, 2015, doi:10.1109/ISSCC.2015.7063133.
4. 4) H. Xu, X. Liu, and L. Yin, “A closed-loop ΣΔ interface for a high-Q micromechanical capacitive accelerometer with 200 ng/√Hz input noise density,” IEEE J. Solid-State Circuits, vol. 50, no. 9, pp. 2101-2112, Sept. 2015, doi:10.1109/JSSC.2015.2428278.
5. 5) H. Xu, J. Wu, H. Zhang, et al., “A 10 mW, 0.4 μg/√Hz, 700 Hz ΣΔ high-order electromechanical modulator for a high-Q micromechanical capacitive accelerometer,” IEEE Sensors J., vol. 18, no. 3, pp. 1187-1194, 1 Feb., 2018, doi:10.1109/JSEN.2017.2780279.
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