Design and Modeling of a Long Range Motion Compliant Nanopositioning Stage Driven by a Normal Stressed Electromagnetic Actuator

Abstract

Compliant nanopositioning stages with built-in ultra-precision actuators are frequently integrated into production and analysis instruments comprising ultra-high precision motion generation systems. These stages are essential nanotechnology and advanced material analysis components, providing precise positioning capabilities for various applications. However, in the practical engineering field, there is a lack of compliant nanopositioning stages that can achieve a long-range motion while maintaining accuracy, reliability, and compact size, which is the inspiration for this research. This paper investigates the design, modeling, and experimental testing of a long-range motion-compliant nanopositioning stage driven by a normal stressed electromagnetic actuator (NSEA). The nanopositioning stage components’ structural framework and working principle, including NSEA, bridge type distributed compliant (BTDC) mechanism, and the guiding mechanism, are fully examined to derive an analytical model. The analytical model is utilized in the sections that follow. Factors affecting the stroke and natural frequency of the nanopositioning stage are also illustrated. The optimization process of the nanopositioning stage is conducted in pursuit of a high-precision stage by specifically looking into the electromagnetic, BTDC mechanism, and guiding mechanism parameters. This optimization procedure also takes into account various design constraints, including stiffness, saturation flux density, and stress. Furthermore, the finite element analysis is used to verify the analytical model, and the results are discussed. The prototype is fabricated with reference to the analytical and finite element analysis results, and the experimental tests are conducted, including motion and natural frequency tests. In addition, a control system, which adopts both a proportional-integral-derivative controller and a damping controller, is designed to create a closed-loop system. Finally, the tracking performance of the stage was investigated, and a very minimal tracking error was observed. Overall, the comprehensive models and experimental tests proved the stage to be a good model which achieved the objective of the research.