A Large-Deflection Electrostatic Actuator for Optical Switching Applications-Reference-Cited by-同舟云学术

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A Large-Deflection Electrostatic Actuator for Optical Switching Applications

Published:2000-06-04 Issue: Volume: Page:
ISSN:
Container-title:2000 Solid-State, Actuators, and Microsystems Workshop Technical Digest
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Author:

Grade J.D.,Jerman H.,Kenny T.W.

Publisher

Transducer Research Foundation, Inc.

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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5. Advanced, vibration-resistant, comb-drive actuators for use in a tunable laser source;Sensors and Actuators A: Physical;2004-09

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