Author:
Hoivik N.,Jahnes C.V.,Cotte J.,Lund J.L.,Seeger D.,Magerlein J.H.
Publisher
Transducer Research Foundation, Inc.
Cited by
2 articles.
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1. RF CMOS MEMS;Advanced Micro and Nanosystems;2005-01-26
2. Fabrication Technology;Advanced Micro and Nanosystems;2005-01-26