Elastic Softening of Surface Acoustic Wave Caused by Vacancy Orbital in Silicon Wafer-Reference-Cited by-同舟云学术

Elastic Softening of Surface Acoustic Wave Caused by Vacancy Orbital in Silicon Wafer

Published:2014-03-15 Issue:3 Volume:83 Page:034702
ISSN:0031-9015
Container-title:Journal of the Physical Society of Japan
language:en
Short-container-title:J. Phys. Soc. Jpn.

Author:

Mitsumoto Keisuke¹,Akatsu Mitsuhiro¹,Baba Shotaro¹,Takasu Rie¹,Nemoto Yuichi¹,Goto Terutaka¹,Yamada-Kaneta Hiroshi²,Furumura Yuji³,Saito Hiroyuki⁴,Kashima Kazuhiko⁴,Saito Yoshihiko⁵

Affiliation:

1. Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan

2. Department of Electrical Engineering and Electronics, Kyushu Institute of Technology, Kitakyushyu 804-8550, Japan

3. Philtech Inc., Bunkyo, Tokyo 113-0033, Japan

4. GlobalWafers Japan Co., Ltd., Seiro, Niigata 957-0197, Japan

5. Toshiba Corporation, Yokohama 225-8522, Japan

Publisher

Physical Society of Japan

Subject

General Physics and Astronomy

Link

https://journals.jps.jp/doi/pdf/10.7566/JPSJ.83.034702

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