Implantation of Deuterium and Helium Ions into a Tungsten-Coated Composite Structures

Abstract

The capture, retention, and thermal desorption of deuterium and helium ions with medium energies implanted into tungsten-coated multilayer functional structures and the formation of corresponding radiation-induced damages in the crystal lattice of the tungsten coatings of those structures have been studied making use of the thermal desorption spectroscopy and electron microscopy methods. The behavior of deuterium and helium in the examined materials and its dependence on the post-implantation heating temperature, the dose of irradiation with D+ and He+ ions, and the irradiation condition – separate (making use of ions of only one kind) or sequential (making use of ions of both kinds) – are analyzed. A classification of radiation-induced defects and mechanisms of their annealing are proposed.