Publisher
National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka)
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. 1. Saleem H. Zaidi, An-Shyang Chu, and S.R.J. Brueck, Optical properties of nanoscale, onedimensional silicon grating structures // J. Appl. Phys. 80(12), p. 6997-7008 (1996).
2. 2. Z. Yu, L. Chen, W. Wu, H. Ge, and S.Y. Chou, Fabrication of nanoscale gratings with reduced line edge roughness using nanoimprinting lithography // J. Vac. Sci. Technol. B21(5), p. 2089-2092 (2003).
3. 3. E. Popov, J. Hoose, B. Frankel, C. Keast, M. Fritze, T.Y. Fan, D. Yost, and S. Rabe, Low polarization dependent diffraction grating for wavelength demultiplexing // Optics Express 12 (2) p. 269-275 (2004).
4. 4. J. Hoose, R. Frankel, E. Popov, M. Neviere, Grating device with high diffraction efficiency // Patent US 6,958,859 B2, Oct. 25 (2005).
5. 5. T. Geppert, S.L. Schweizer, U. Gosele, R.B. Wehrspohn, Deep trench etching in macroporous silicon // Appl. Phys. A 84, p. 237-242 (2006).
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献