Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication-Reference-Cited by-同舟云学术

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Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication

Published:2019-09-20 Issue:4 Volume:15 Page:55-61
ISSN:2409-9066
Container-title:Science and innovation
language:
Short-container-title:Sci. innov.

Author:

Ponomarev O.G., ,Rebrov V.А.,Kolinko S.V., ,

Publisher

National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka)

Subject

Law,Management of Technology and Innovation,Information Systems and Management,Computer Science Applications,Engineering (miscellaneous)

Reference12 articles.

1. Proton beam writing: review;Watt;Materials today,2007

2. Ion beam lithography and nanofabrication: a review;Watt;International Journal of Nanoscience,2005

3. Fabrication of micro-optical components in polymer using proton beam writing;Bettiol;Proc of SPIE,2004

4. Performance of the Sumy nuclear microprobe with the integrated probe-forming system;Magilin;Nucl Instr and Meth B,2009

5. The Sumy scanning nuclear microprobe: design features and first tests;Storizhko;Nucl Instr and Meth B,2007

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