1. 1. Morozov A. I. Introduction to Plasmadynamics. Moscow: Fizmatlit, 2006. 576 pp. (in Russian).
2. 2. Anders Andre. From Plasma Immersion Ion Implantation To Deposition: A Historical Perspepective on Principles and Trends. https://www.semanticscholar.org/paper/.
3. 3. Aksenov I. I., Andreeev A. A., Belous A. et al. Vacuum Arc. Plasma Sources, Coating Deposition, and Surface Modification. Kyiv: Naukova Dumka, 2012. 727 pp. (in Russian).
4. 4. Svadkovsky I. V. Lines of the development of magnetron sputtering systems. Doklady BGUIR. 2007. No. 2(18). Pp. 112-121. (in Russian).
5. 5. Ivanovsky G. F., Petrov V. I. Ion Plasma Treatment of Materials. Moscow: Radio i Svyaz', 1986. 232 pp. (in Russian).