Author:
Pal A.F.,Rudavets A.G.,Ryabinkin A.N.,Serov A.O.
Abstract
The technique for a metal film deposition on spherical microparticles in an RF plasma trap is presented. Both the particle confinement and the electrode sputtering are performed by a single RF magnetron discharge. The samples of a coated spheres are obtained and examined. The technique allows confining the particles near to the sputtered region close to the border zone of ballistic bombardment by sputtered atoms.
Publisher
National Academy of Sciences of Ukraine (Co. LTD Ukrinformnauka) (Publications)
Subject
General Physics and Astronomy
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