Abstract
Abstract
The study aimed to theoretically investigate the transfer characteristics of MOSFETs at cryogenic temperatures to elucidate the experimental conditions affecting the accurate estimation of the drain-induced barrier lowering (DIBL) parameter. Our Technology Computer Aided Design (TCAD) simulation revealed that MOSFETs featuring an underlap between the gate and source/drain edges experience a significant shift in threshold voltage (V
t) in the low drain voltage (V
d) region, which causes the misestimation of the DIBL parameter. This V
t change is due to a notable increase in carrier concentration within the underlap region. To mitigate misestimation in such underlap devices, confirming the dependence of the DIBL parameter on the linear region of V
d serves as an effective method to ensure accurate estimation.
Funder
New Energy and Industrial Technology Development Organization