Author:
Takada Kosuke,Nishiyama Shusuke,Sasaki Koichi
Abstract
Abstract
We compared the translational temperatures of
He
(
1
P
1
o
)
,
He
(
3
S
1
)
, and
Ar
(
4
s
[
3
/
2
]
2
o
)
in low-pressure inductively coupled plasmas. We employed laser absorption spectroscopy for measuring the Doppler broadening widths of the transition lines, and they told us the translational temperatures of the three electronic excited states. From the comparison between the temperatures of
He
(
1
P
1
o
)
and
He
(
3
S
1
)
, we confirmed that the metastable 3
S
1 state can work as the probe for the temperature measurement of the ground state helium atoms. We observed higher temperatures for
Ar
(
4
s
[
3
/
2
]
2
o
)
than
He
(
3
S
1
)
in helium–argon mixture plasmas with total pressures less than 80 mTorr. The higher
Ar
(
4
s
[
3
/
2
]
2
o
)
temperature is considered to be due to the selective heating of argon by the charge exchange collision with Ar+.
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
1 articles.
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