Suppression of spurious responses near anti-resonance of TC-SAW resonators by selective thinning of SiO2

Abstract

Abstract This paper discusses the generation mechanism and suppression of spurious resonances near the anti-resonance in temperature compensated surface acoustic wave devices using the SiO2/128°YX-LiNbO3 structure. Detailed field analysis is performed for the spurious resonances, and the result indicates that the spurious modes are caused by excitation and/or scattering near the electrode finger edges, and can be suppressed well by thinning of the SiO2 layer selectively in the gap region. It is also shown that most of spurious responses can be suppressed for the piston design using the Cu dots with the SiO2 selective thinning. In contrast, this selective SiO2 thinning does not work well for the piston design using the Cu stripes.