Highly coupled leaky surface acoustic wave on hetero acoustic layer structures based on ScAlN thin films with a c-axis tilt angle-Reference-Cited by-同舟云学术

Highly coupled leaky surface acoustic wave on hetero acoustic layer structures based on ScAlN thin films with a c-axis tilt angle

Author:

Liu Huiling^ORCID,Zhang Qiaozhen,Zhao Xiangyong,Wang Feifei,Chen Mingzhu,Li Baichuan,Fu Sulei,Wang Weibiao

Funder

the National Natural Science Youth Foundation of China

National Natural Science Foundation of China

the Science and Technology Commission of Shanghai Municipality

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

Reference36 articles.

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