Analysis of electron heating due to partial resonance in an inductively coupled plasma under confronting divergent magnetic fields

Abstract

Abstract We investigate the partial resonance as one of the mechanisms of the electron heating to sustain inductively coupled plasmas driven under confronting divergent magnetic fields having an electron confinement function. The dependence of the partial resonance on operating conditions is observed. The electron energy gain (EEG), defined as a measure for evaluation of the partial resonance, was calculated by a Monte Carlo method under various magnetic field strengths and RF antenna positions. It is confirmed that the partial resonance is observed in the resonant region even in low electric field and a strong magnetic field. As an attempt to utilize the partial resonance, we demonstrate enhancement of the EEG and resulting ionization in the resonant region by placing the RF antenna near a region where the magnetic field lines running through the resonant region reach.