Tuning the flexural frequency of overhang-/T-shaped microcantilevers for high harmonics

Abstract

Abstract High-harmonic (HH) frequencies in microcantilevers impose several applications in precision detection thanks to the higher sensitivity of the higher modes in comparison to the fundamental modes. In this study, we showed that by tuning the cantilever length by changing the clamped position, the dimensional ratio of the overhang to the main cantilever part is altered and the HHs could be effectively obtained. Multiple HH frequencies have been achieved, from the 4th to 8th order of the second and from the 11th to 26th order of the third-mechanical mode versus the first mode, and these orders are much higher if higher modes are used. The analytical calculation is in agreement with available results of other groups. HH behavior when the cantilever interacts with the sample is also examined and is strongly dependent on the overhang parameters. These results could guide the experimentalist in the tuning and controlling of the HHs in detecting objects.