Evaluation of friction characteristics between PVA sponge and solid materials using surface free energy measurements

Abstract

Abstract In order to evaluate the phenomena in a contiguous interface between a wet polyvinyl alcohol (PVA) sponge and various wafers during a chemical mechanical polishing cleaning process, the torques of a rolling wet PVA sponge were measured when it was pressed against various materials. In particular, we sought to determine how the torques between two materials were affected by surface free energy, which is a surface condition parameter consisting of hydrogen bonding component and dispersive component. The results of our investigation suggest that increasing the rotational speed of a wet PVA sponge decreases some of the torques generated due to hydrogen bonding component interactions.