Design and fabrication of photonic crystal resonators for single-mode and vertical surface emission from strain-compensated quantum cascade lasers operating at 4.32 μm

Abstract

Abstract Photonic crystal resonators with the C4v symmetry were designed and fabricated on quantum cascade lasers with a strain-compensated multiple quantum well to achieve single-mode and vertical surface emission at 4.32 μm. Their fabrication accuracy was confirmed by high-resolution reflection spectroscopy. The maximum output power was 10 mW at 77 K. A far-field pattern with a small divergence angle below 1 degree was observed. Its main peak had a donut shape, which was attributed to the spatial symmetry of the resonance mode of the photonic crystal.