Intense emission of surface-derived secondary ions from shallow-angle impacts of energetic MeV C60 ions

Abstract

Abstract Impacts of energetic C60 ions with energies of the order of MeV are excellent ionization methods for highly sensitive secondary ion (SI) mass spectrometry because they can provide SIs necessary for the identification of target materials in high emission yields with high reproducibility. As part of an investigation into their SI emission phenomena with the aim of controlling the mass-analyzed depth range, we measured and characterized the impact angle dependence of SI mass spectra for MeV C60 ion impacts, and found that shallower angle impacts of MeV C60 ions can provide surface-sensitive information through intense emission of surface-derived SIs.