Abstract
Abstract
Strained-Si technology is crucial to improving the performance of metal-oxide-semiconductor field-effect transistors (MOSFETs). To introduce large strain into the channel, we proposed a structure for the negative thermal expansion gate electrode. In this study, we used manganese nitride as the gate material, which is a negative thermal expansion material. The fabricated MOSFETs with the manganese nitride gate showed a 10% increase in electron mobility compared to the MOSFET with the Al gate. The results show that the negative thermal expansion gate technology is promising as a technology booster for MOSFET scaling.
Funder
Japan Society for the Promotion of Science
Subject
General Physics and Astronomy,General Engineering
Cited by
3 articles.
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