Multidirectional UV lithography via inclined/rotated mirrors for liquid materials
Author:
Funder
Japan Society for the Promotion of Science
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
https://iopscience.iop.org/article/10.35848/1882-0786/ab9656/pdf
Reference18 articles.
1. Fundamentals of Microfabrication
2. 3D microfabrication with inclined/rotated UV lithography
3. Multidirectional UV Lithography for Complex 3-D MEMS Structures
4. One-step maskless grayscale lithography for the fabrication of 3-dimensional structures in SU-8
5. Microneedles for drug and vaccine delivery
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1. Liquid-immersion inclined-rotated exposure system for fabricating three-dimensional microstructures with large inclination angles;Journal of Micromechanics and Microengineering;2024-08-27
2. Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup Array;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
3. Liquid-immersion inclined UV lithography using cube prism and mirrors;Applied Physics Express;2022-10-17
4. Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists;International Journal of Precision Engineering and Manufacturing-Green Technology;2021-09-03
5. Tiltable UV-LED Lithography for 3D Microfabrication;2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers);2021-06-20
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