Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition-Reference-Cited by-同舟云学术

Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition

Published:2020-08-01 Issue:8 Volume:13 Page:087001
ISSN:1882-0778
Container-title:Applied Physics Express
language:
Short-container-title:Appl. Phys. Express

Author:

Ishi Daiki,Ezoe Yuichiro,Ishikawa Kumi,Numazawa Masaki^ORCID,Fukushima Aoto,Otsubo Ryota,Suzuki Hikaru,Yuasa Tatsuya,Sakuda Sae,Uchino Tomoki,Fujitani Maiko,Mitsuda Kazuhisa,Sowa Mark J.^ORCID

Funder

Toray Science Foundation

MEXT/JSPS KAKENHI

Publisher

IOP Publishing

Subject

General Physics and Astronomy,General Engineering

Link

https://iopscience.iop.org/article/10.35848/1882-0786/aba7a5/pdf

Reference30 articles.

1. Spiegelsysteme streifenden Einfalls als abbildende Optiken für Röntgenstrahlen

2. Design Parameters of Paraboloid-Hyperboloid Telescopes for X-ray Astronomy

3. On the concentration, focusing, and collimation of x‐rays and neutrons using microchannel plates and configurations of holes

4. Micropore x-ray optics using anisotropic wet etching of (110) silicon wafers

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