Fabrication of Cu grating guided-mode resonance filter by electroplating

Abstract

Abstract A polarization wavelength filter was fabricated using two-beam interference and electroplating methods. The device consists of a Cu grating with a pitch of 400 nm on an ITO film. For normal incidence, the transverse magnetic (TM) transmission spectrum had a sharp spectrum at a wavelength of 648 nm and a significant dip at 735 nm. Furthermore, a sharp reflection spectrum in TM-light was obtained at a 685 nm wavelength and incident angle of 40°, and the peak wavelength shifted to a longer wavelength as the incident angle increased. This fabrication method is less complex and inexpensive than conventional methods.