Corrosion Study of an Al-Cu Alloy Exposed to Reactive Ion Etching

Author:

Brusic V.,Frankel G. S.,Hu C.-K.,Plechaty M. M.,Rush B. M.

Publisher

NACE International

Subject

General Materials Science,General Chemical Engineering,General Chemistry

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. A review on the use of microslit for various applications and its fabrication;Journal of the Brazilian Society of Mechanical Sciences and Engineering;2024-01-28

2. Metallization;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22

3. Electrochemical Techniques for Corrosion;Encyclopedia of Electrochemistry;2003-02-21

4. Plasma-etching processes for ULSI semiconductor circuits;IBM Journal of Research and Development;1999-01

5. Localized corrosion of sputtered Al1wt.%Si0.5wt.%Cu alloy thin film;Thin Solid Films;1994-02

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