Author:
Gamo Kenji,Ukegawa Takeshi,Namba Susumu
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
17 articles.
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1. Focused Ion Beams;Handbook of Charged Particle Optics, Second Edition;2008-10-24
2. Practical Focused Ion Beam Optics and Systems;High Resolution Focused Ion Beams: FIB and its Applications;2003
3. Physics of Liquid Metal Ion Sources;High Resolution Focused Ion Beams: FIB and its Applications;2003
4. The effects of source temperature and emission current on the mass spectrum and the angular distribution of the ions emitted by an AuSi field ion source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-01
5. Ion Implantation;Fundamentals of Semiconductor Processing Technology;1995