Author:
Kamm Frank-Michael,Ehrmann Albrecht,Schäfer Herbert,Pamler Werner,Käsmaier Rainer,Butschke Jörg,Springer Reinhard,Haugeneder Ernst,Löschner Hans
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Submicrometer Comb-Drive Actuators Fabricated on Thin Single Crystalline Silicon Layer;IEEE Transactions on Industrial Electronics;2009-04
2. A Varifocal Convex Micromirror Driven by a Bending Moment;IEEE Journal of Selected Topics in Quantum Electronics;2009
3. Stress Control of Silicon Membrane for Optical Scanner with Deformable Mirror;IEEJ Transactions on Sensors and Micromachines;2009
4. Masks for Extreme Ultraviolet Lithography;Handbook of Photomask Manufacturing Technology;2005-04-07
5. Bibliography (1994–2004) of other topics;Modelling and Simulation in Materials Science and Engineering;2004-12-08