Preparation of Orientation-Controlled Polycrystalline Pb(Zr, Ti)O3Thick Films on (100)Si Substrates by Metalorganic Chemical Vapor Deposition and Their Electrical Properties
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/41/i=11S/a=6705/pdf
Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Low thermal budget lead zirconate titanate thick films integrated on Si for piezo-MEMS applications;Microelectronic Engineering;2020-01
2. Preparation of {001}c-oriented epitaxial (K, Na)NbO3 thick films by repeated hydrothermal deposition technique;Journal of the Ceramic Society of Japan;2018-05-01
3. In-plane orientation and composition dependences of crystal structure and electrical properties of {100}-oriented Pb(Zr,Ti)O3films grown on (100) Si substrates by metal organic chemical vapor deposition;Japanese Journal of Applied Physics;2017-09-22
4. Preparation of 0.055BaZrO3–0.935(K0.45Na0.5Li0.05)NbO3–0.01(Bi0.5Na0.5)TiO3 piezoelectric thin films from precursor solution by Pechini method;Journal of Advanced Dielectrics;2017-04
5. A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits;Energy Harvesting and Systems;2017-01-01
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