Tungsten Based Electrodes for Stacked Capacitor Ferroelectric Memories-Reference-Cited by-同舟云学术

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Tungsten Based Electrodes for Stacked Capacitor Ferroelectric Memories

Published:2002-11-30 Issue:Part 1, No. 11B Volume:41 Page:6862-6866
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Trupina L.,Baborowski J.,Muralt P.,Meyer V.,Bouvet D.,Fazan P.,Lobet M.

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/41/i=11S/a=6862/pdf

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thermal stability of N2–H2plasma-treated metal-organic-vapor-deposition TiN in a W/TiN/Ti/Si system;Semiconductor Science and Technology;2011-09-06

2. Microfabrication of Piezoelectric MEMS;Electroceramic-Based MEMS;2005

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