Semi-epitaxial bcc Ta Growth on Metal Nitride-Reference-Cited by-同舟云学术

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Semi-epitaxial bcc Ta Growth on Metal Nitride

Published:2002-06-15 Issue:Part 1, No. 6A Volume:41 Page:3902-3908
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ikeda Mitsushi,Murooka Michio,Suzuki Kouji

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/41/i=6R/a=3902/pdf

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