The Preparation of Piezoelectric ZnO Films by RF Magnetron Sputtering for Layered Surface Acoustic Wave Device Applications-Reference-Cited by-同舟云学术

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The Preparation of Piezoelectric ZnO Films by RF Magnetron Sputtering for Layered Surface Acoustic Wave Device Applications

Published:2006-04-25 Issue:4B Volume:45 Page:3531-3536
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Liu Day-Shan,Wu Cheng-Yang,Sheu Chia-Sheng,Tsai Fu-Chun,Li Cheng-Hsien

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical and Electrophysical Properties of Thin Zinc Oxide Films Doped with Scandium and Obtained by Laser Deposition;Journal of Applied Spectroscopy;2020-11

2. Deposition and characterization of ZnO thin films on GaAs and Pt/GaAs substrates;Materials Chemistry and Physics;2020-06

3. Formation of SiO2 buffer layer for LiNbO3 thin films growth;Journal of Physics: Conference Series;2019-12-01

4. ZnO Nanometric Layers Used in Photovoltaic Cells;IFMBE Proceedings;2019-09-18

5. Investigation on the Deposition of an AlN-ZnO/ZnO/AlN-ZnO Double Heterojunction Structure Using Radio Frequency Magnetron Cosputtering Technology;Coatings;2019-08-25

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