Numerical Calculation of Implanted Nitrogen Diffusion in SUS304 during Plasma-Based Ion Implantation
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Published:2006-10-24
Issue:10B
Volume:45
Page:8168-8171
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Akamatsu Hiroshi,Hattori Hiroyuki
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering