Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
33 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Selective reactive ion etching of silicon nitride over silicon using CHF3 with N2 addition;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-09
2. I Guided-Wave Optics on Silicon: Physics, Technology, and Status;Progress in Optics;1993
3. References;Thin Films by Chemical Vapour Deposition;1990
4. Anisotropic reactive ion etching of titanium;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1989-07
5. Dry Etching Processes;Microelectronic Materials and Processes;1989