Characteristics of SiO2as a High-Resolution Electron Beam Resist
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 25 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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4. Modulable Nanometer-Scale Surface Architecture Using Spin-Coating on an Adsorbed Collagen Layer;Nano Letters;2001-04-13
5. Properties of Si nanowire devices fabricated by using an inorganic EB resist process;Superlattices and Microstructures;2000-11
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