Synthesis and Surface Acoustic Wave Property of Aluminum Nitride Thin Films Fabricated on Silicon and Diamond Substrates Using the Sputtering Method-Reference-Cited by-同舟云学术

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Synthesis and Surface Acoustic Wave Property of Aluminum Nitride Thin Films Fabricated on Silicon and Diamond Substrates Using the Sputtering Method

Published:2001-08-15 Issue:Part 1, No. 8 Volume:40 Page:5065-5068
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ishihara Masatou,Manabe Takaaki,Kumagai Toshiya,Nakamura Takako,Fujiwara Syuzo,Ebata Yasuo,Shikata Shin-ichi,Nakahata Hideaki,Hachigo Akihiro,Koga Yoshinori

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

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