Noncontact Self-Running Ultrasonically Levitated Two-Dimensional Stage Using Flexural Standing Waves
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference12 articles.
1. A Low-Profile Design for the Noncontact Ultrasonically Levitated Stage
2. An ultrasonically levitated noncontact stage using traveling vibrations on precision ceramic guide rails
3. A stator for a self-running, ultrasonically-levitated sliding stage
4. Trial Construction of a Noncontact Ultrasonic Motor with an Ultrasonically Levitated Rotor
5. Resonant Mode Design for Noncontact Ultrasonic Motor with Levitated Rotor
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