Author:
Kinomura Atsushi,Takai Mikio,Chayahara Akiyoshi,Fujii Kanenaga,Satou Mamoru,Namba Susumu
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
3 articles.
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1. Applications of focused MeV ions to materials modification and analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09
2. Three-dimensional analysis of locally deposited silicon oxide on ferrite by a combination of microprobe RBS and PIXE;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
3. Nuclear microprobe development and application to microelectronics;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03