Control of Hydrocarbon Radicals and Amorphous Carbon Film Deposition by Means of RF Whistler Wave Discharge-Reference-Cited by-同舟云学术

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Control of Hydrocarbon Radicals and Amorphous Carbon Film Deposition by Means of RF Whistler Wave Discharge

Published:1992-06-15 Issue:Part 1, No. 6A Volume:31 Page:1879-1884
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Mieno Tetsu,Shoji Tatsuo,Kadota Kiyoshi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Plasma Deposition of Permanent Superhydrophilic a-C:H:N Films on Textiles;Plasma Processes and Polymers;2007-05-23

4. Incorporation of Accessible Functionalities in Nanoscaled Coatings on Textiles Characterized by Coloration;Plasma Processes and Polymers;2007-02-22

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