Bias Effect on the Microstructure and Diffusion Barrier Capability of Sputtered TiN and TiOxNyFilms
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 20 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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4. Characterization of the Oxidized CVD Diamond (100) Surfaces using STM, PEEM and XPS;Shinku;2005
5. Influence of iron–silicon interaction on the growth of carbon nanotubes produced by chemical vapor deposition;Applied Physics Letters;2002-04
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