Diamond Film Formation by OH Radical Injection from Remote MicrowaveH2/H2OPlasma into Parallel-Plate RF Methanol Plasma-Reference-Cited by-同舟云学术

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Diamond Film Formation by OH Radical Injection from Remote MicrowaveH2/H2OPlasma into Parallel-Plate RF Methanol Plasma

Published:1996-09-15 Issue:Part 1, No. 9A Volume:35 Page:4826-4832
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ikeda Masanobu,Mizuno Etsuko,Hori Masaru,Goto Toshio,Yamada Koji,Hiramatsu Mineo,Nawata Masahito

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Theoretical and experimental research on growth and doping mechanisms of diamond films fabricated using liquid carbon source precursors;Applied Surface Science;2023-08

2. Plasma Deposition of Diamond at Low Pressures: A Review;IEEE Transactions on Plasma Science;2014-12

3. UV Grafting of a Vinyl Monomer Onto a Methanol Plasma Polymer;Plasma Processes and Polymers;2012-08-14

4. Diamond synthesis under atmospheric pressure from ethanol-water solution using hot-filament chemical vapor deposition method assisted by electrospray;Journal of Applied Physics;2005-12

5. Absolute concentration and loss kinetics of hydrogen atom in methane and hydrogen plasmas;Journal of Applied Physics;2001-12

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