Electrical Properties of AlGaAs/GaAs Two-Dimensional Electron Gases (2DEGs) Grown on GaAs Substrates Cleaned by an Electron Cyclotron Resonance (ECR) Hydrogen Plasma
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Characteristics of the GaInP burying layers grown by metalorganic chemical vapor deposition on mesa-patterned GaAs substrates;Journal of Crystal Growth;2000-02
2. Characterization of in situ etched and molecular beam epitaxy regrown GaAs interfaces using capacitance–voltage measurements, far infrared spectroscopy, and magnetotransport measurements;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000
3. Mobility (106 cm2 V−1 s−1) of 2DEGs, 30 nm from ex situ patterned GaAs regrowth interfaces;Materials Science and Engineering: B;1998-02
4. Characterization of an n-GaAs layer grown on a GaAs substrate cleaned by an electron cyclotron resonance hydrogen plasma;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-01
5. In situ processing of III–V semiconductors: Mile stones and future prospects;Progress in Crystal Growth and Characterization of Materials;1997-01
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