Overlay Accuracy Measurement Technique Using the Latent Image on a Chemically Amplified Resist
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Published:1996-01-15
Issue:Part 1, No. 1A
Volume:35
Page:56-60
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Yamashita Kazuhiro,Muro Masahiro,Kobayashi Satoshi,Katsuyama Akiko,Endo Masayuki
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering