Antenna Charging Effects on the Electrical Characteristics of Polysilicon Gate during Electron Cyclotron Resonance Etching
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Published:1996-02-15
Issue:Part 1, No. 2A
Volume:35
Page:578-583
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Kang Tzong-Kuei,Ueng Shih-Yuan,Dai Bau-Tong,Chen Liang-Po,Cheng Huang-Chung
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering