Author:
Ishida Koji,Takamori Takeshi,Matsui Kazunori,Fukunaga Toshiaki,Morita Tetsuo,Miyauchi Eizo,Hashimoto Hisao,Nakashima Hisao
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
18 articles.
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1. Micromachined multiple focused-ion-beam devices;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-03
2. Focused Ion Beams for Direct Writing;Direct-Write Technologies for Rapid Prototyping;2002
3. Focused ion beam implantation for opto- and microelectronic devices;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-07
4. Review of focused ion beam implantation mixing for the fabrication of GaAs-based optoelectronic devices;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-11
5. GaAs quantum well distributed Bragg reflection laser with AlGaAs/GaAs superlattice gratings fabricated by focused ion beam mixing;Applied Physics Letters;1995-07-10