Author:
Suzuki Hiroshi,Nobata Kanehiro
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
9 articles.
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1. Gas-phase diagnostics during H2 and H2O plasma treatment of SnO2 nanomaterials: Implications for surface modification;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-03
2. Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP film;Acta Physica Sinica;2009
3. Literaturhinweise;Optische in situ Meßtechniken bei der Entwicklung und Anwendung von plasmaunterstützten Oberflächentechniken für räumlich ausgedehnte und komplexe Geometrien;1998
4. Deposition of silicon nitride by low-pressure electron cyclotron resonance plasma enhanced chemical vapor deposition in N[sub 2]/Ar/SiH[sub 4];Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-11
5. Characterization of the diamond growth process using optical emission spectroscopy;Journal of Applied Physics;1997-03-15