Discharging Current Transient Spectroscopy for Evaluating Traps in Insulators
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 30 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A high-precision current measurement platform applied for statistical measurement of discharge current transient spectroscopy of traps in SiN dielectrics;Japanese Journal of Applied Physics;2021-07-27
2. Re-consideration of Influence of Fluorine on SiO2 and SixNy Reliabilities;2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM);2021-04-08
3. Further Investigation on Mechanism of Trap Level Modulation in Silicon Nitride Films by Fluorine Incorporation;2020 IEEE International Reliability Physics Symposium (IRPS);2020-04
4. Evaluation of electron traps in SiNx by discharge current transient spectroscopy: verification of validity by comparing with conventional DLTS;Japanese Journal of Applied Physics;2019-02-22
5. Experimental evidence of trap level modulation in silicon nitride thin films by hydrogen annealing;Japanese Journal of Applied Physics;2018-05-21
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