Author:
Arizumi Tetsuya,Nishinaga Tatau,Ogawa Hiroshi
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
14 articles.
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1. Chemical Vapor Deposition;Handbook of Semiconductor Manufacturing Technology, Second Edition;2007-07-09
2. Thin Film Deposition;Fundamentals of Semiconductor Processing Technology;1995
3. References;Thin Films by Chemical Vapour Deposition;1990
4. Laser‐induced chemical vapor deposition of silicon nitride films: Film and process characterizations;Journal of Applied Physics;1987-05
5. Thermodynamic investigations of the gas phase reaction of SiH4 and O2 at atmospheric pressure;Thin Solid Films;1986-07