Thermodynamic Study of the Transport and Epitaxial Growth of GaAs in an Open Tube
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 41 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. References;Thin Films by Chemical Vapour Deposition;1990
2. Vapor Phase Epitaxy of AlGaAs by Direct Reaction between AlCl3, GaCl3and AsH3/H2;Japanese Journal of Applied Physics;1989-01-20
3. Vapor Phase Epitaxial Growth of AlAs by Chloride Transport Method;Journal of The Electrochemical Society;1987-06-01
4. Physicochemical analysis of InAs gas phase epitaxy in the InAs-AsCl3-H2 system II: InAs transport and epitaxial growth kinetics;Thin Solid Films;1987-02
5. Chemical transport ofβ-Ga2O3 using chlorine as a transporting agent;Journal of Materials Science;1986-10
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