Formation of Periodic Microbump Arrays by Metal-Assisted Photodissolution of InP
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference16 articles.
1. Formation Mechanism and Properties of Electrochemically Etched Trenches in n‐Type Silicon
2. Formation of three-dimensional microstructures by electrochemical etching of silicon
3. Patterned arrays of porous InP from photolithography and electrochemical etching
4. Large-Area Three-Dimensional Structuring by Electrochemical Etching and Lithography
5. Waveguide Structures Based on Porous Indium Phosphide
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