Contour-Mode AlN Resonator with High Coupling Factor
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference4 articles.
1. Interpolation Technique for Fast Analysis of Surface Acoustic Wave and Lamb Wave Devices
2. Influence of Underlayer Materials on Preferred Orientations of Sputter-Deposited AlN/Mo Bilayers for Film Bulk Acoustic Wave Resonators
3. Analysis ofQ-Value of Quartz Crystal Tuning Fork Using Thermoelastic Coupling Equations
4. Q values of longitudinal leaky SAWs propagating on rotated Y-cut LN substrates along the perpendicular to the X axis
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1. Temperature Characteristics of a Contour Mode MEMS AlN Piezoelectric Ring Resonator on SOI Substrate;Micromachines;2021-01-29
2. Moving Tunable Filters Forward: A \"Heterointegration\" Research Project for Tunable Filters Combining MEMS and RF SAW\/BAW Technologies;IEEE Microwave Magazine;2015-08
3. AlN micromechanical radial-contour disc resonator;Journal of Micromechanics and Microengineering;2013-08-01
4. High-order resonances of AlN-film radial extensional mode resonator;2012 IEEE International Ultrasonics Symposium;2012-10
5. Quality Factor of Contour-Mode AlN Resonator;Japanese Journal of Applied Physics;2012-07-20
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